The effect of pulse DC and DC substrate bias during in situ cleaning PVD process on surface roughness
Malaysian Technical Universities Conference on Engineering and Technology (MUCET) 2012 organised by technical universities under the Malaysian Technical Universities Network (MTUN), 20th - 21st November 2012 at Hotel Seri Malaysia, Kangar, Perlis, Malaysia.
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| Main Authors: | , , , , |
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| 其他作者: | |
| 格式: | Working Paper |
| 语言: | English |
| 出版: |
Malaysian Technical Universities Network (MTUN)
2013
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| 在线阅读: | http://dspace.unimap.edu.my/xmlui/handle/123456789/27355 |
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