Electrostatic pull-in characteristic of silicon diaphragm for MEMS micropump design
Malaysian Technical Universities Conference on Engineering and Technology (MUCET) 2012 organised by technical universities under the Malaysian Technical Universities Network (MTUN), 20th - 21st November 2012 at Hotel Seri Malaysia, Kangar, Perlis.
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| Main Authors: | , |
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| 格式: | Working Paper |
| 语言: | English |
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Malaysian Technical Universities Network (MTUN)
2013
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| 在线阅读: | http://dspace.unimap.edu.my/xmlui/handle/123456789/26593 |
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