Optimization of 950K PMMA resists for Nano-application using Statistical Design Expert

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Bibliographic Details
Main Author: Khoo Chien Chin
Other Authors: Uda Hashim, P.M. Dr. (Advisor)
Format: Learning Object
Language:English
Published: Universiti Malaysia Perlis 2008
Subjects:
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/2390
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Summary:Access is limited to UniMAP community.