Description: Effect of different dielectric materials for Ultrathin Oxide

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Bibliographic Details
Main Author:	Zarimawaty Zailan
Other Authors:	Mohd Hafiz Ismail (Advisor)
Format:	Learning Object
Language:	English
Published:	Universiti Malaysia Perlis 2008
Subjects:	Dielectrics Silicon oxide films Semiconductors Ultrathin oxide Lower leakage current High-k materials Integrated circuits Metal Oxide Semiconductor Field Effect Transistor (MOSFET)
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/2007
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Summary:	Access is limited to UniMAP community.