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Study of Deposition Time Influence the Conical Structure during Electron Beam Induced Deposition (EBID)

Atomic force microscopy (AFM) is now a well-established technique for the surface characterization and imaging of a variety of materials. In AFM the accuracy of data is often limited by the tip geometry and the effect on this geometry of wear. One way to improve the tip geometry is by fabricate a sl...

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Bibliographic Details
Main Author: Mohamad Sharizal Md Ilias
Other Authors: Shaiful Nizam Mohyar (Advisor)
Format: Learning Object
Language:English
Published: Universiti Malaysia Perlis 2008
Subjects:
Atomic Force Microscope
Electron beams
Scanning electron microscopes
Microelectronics
Semiconductors > Design and construction
Clean rooms
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/2001
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spelling my.unimap-20012008-09-09T02:55:44Z Study of Deposition Time Influence the Conical Structure during Electron Beam Induced Deposition (EBID) Mohamad Sharizal Md Ilias Shaiful Nizam Mohyar (Advisor) Atomic Force Microscope Electron beams Scanning electron microscopes Microelectronics Semiconductors -- Design and construction Clean rooms Atomic force microscopy (AFM) is now a well-established technique for the surface characterization and imaging of a variety of materials. In AFM the accuracy of data is often limited by the tip geometry and the effect on this geometry of wear. One way to improve the tip geometry is by fabricate a slim probe on tip of cantilever probe by vertical growth method. In this project, we used the electron beam induced deposition (EBID) method which is formed in scanning electron microscope (SEM). The material that we developed on the silicon wafer is a carbon. The influence of deposition time to the length, diameter and shape of the deposited structure has been studied and analyzed in this project. Deposition time from one to nine minutes and acceleration voltage between 21 kV to 24 kV has been used as the parameter. High potential of slim probe for AFM fabricated at Unimap’s Clean Room can be utilized for commercialization potential. Therefore further research and improvement of slim probe for AFM formation is crucial to further develop in semiconductor technology 2008-09-09T02:55:44Z 2008-09-09T02:55:44Z 2008-04 Learning Object http://hdl.handle.net/123456789/2001 en Universiti Malaysia Perlis School of Microelectronic Engineering
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Atomic Force Microscope
Electron beams
Scanning electron microscopes
Microelectronics
Semiconductors -- Design and construction
Clean rooms
spellingShingle Atomic Force Microscope
Electron beams
Scanning electron microscopes
Microelectronics
Semiconductors -- Design and construction
Clean rooms
Mohamad Sharizal Md Ilias
Study of Deposition Time Influence the Conical Structure during Electron Beam Induced Deposition (EBID)
description Atomic force microscopy (AFM) is now a well-established technique for the surface characterization and imaging of a variety of materials. In AFM the accuracy of data is often limited by the tip geometry and the effect on this geometry of wear. One way to improve the tip geometry is by fabricate a slim probe on tip of cantilever probe by vertical growth method. In this project, we used the electron beam induced deposition (EBID) method which is formed in scanning electron microscope (SEM). The material that we developed on the silicon wafer is a carbon. The influence of deposition time to the length, diameter and shape of the deposited structure has been studied and analyzed in this project. Deposition time from one to nine minutes and acceleration voltage between 21 kV to 24 kV has been used as the parameter. High potential of slim probe for AFM fabricated at Unimap’s Clean Room can be utilized for commercialization potential. Therefore further research and improvement of slim probe for AFM formation is crucial to further develop in semiconductor technology
author2 Shaiful Nizam Mohyar (Advisor)
author_facet Shaiful Nizam Mohyar (Advisor)
Mohamad Sharizal Md Ilias
format Learning Object
author Mohamad Sharizal Md Ilias
author_sort Mohamad Sharizal Md Ilias
title Study of Deposition Time Influence the Conical Structure during Electron Beam Induced Deposition (EBID)
title_short Study of Deposition Time Influence the Conical Structure during Electron Beam Induced Deposition (EBID)
title_full Study of Deposition Time Influence the Conical Structure during Electron Beam Induced Deposition (EBID)
title_fullStr Study of Deposition Time Influence the Conical Structure during Electron Beam Induced Deposition (EBID)
title_full_unstemmed Study of Deposition Time Influence the Conical Structure during Electron Beam Induced Deposition (EBID)
title_sort study of deposition time influence the conical structure during electron beam induced deposition (ebid)
publisher Universiti Malaysia Perlis
publishDate 2008
url http://dspace.unimap.edu.my/xmlui/handle/123456789/2001
_version_ 1643787527007502336
score 13.211869

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