Reactive Ion Etching (RIE) Etched Wet-Silica-On-Silicon Analysis for Fluid Wettability
RIE etched wet silica-on-silicon analysis is more to surface roughness analysis which analysis on silica substrate after plasma etching especially on de-ionized water droplets testing for fluid wettability scope. The thick oxide is needed for RIE purpose and characterized the etching and surface pr...
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| 格式: | Learning Object |
| 语言: | English |
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Universiti Malaysia Perlis
2008
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| 在线阅读: | http://dspace.unimap.edu.my/xmlui/handle/123456789/1333 |
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