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Properties of zinc tin oxide thin film by aerosol assisted chemical vapor deposition (AACVD)

This study focuses on the properties of ZTO which have been deposited by a low-cost method namely aerosol assisted chemical vapor deposition (AACVD). The precursors used in this method were zinc acetate dihidrate and tin chloride dihydrate for ZTO thin film deposition. Both precursors were mixed and...

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Main Authors: Muhammad Arif Riza, Abu Bakar Abd Rahman, Suhaila Sepeai, Norasikin Ahmad Ludin, Mohd Asri Mat Teridi, Mohd Adib Ibrahim
Format: Article
Language:English
Published: 2018
Subjects:
TP Chemical technology
Online Access:https://eprints.ums.edu.my/id/eprint/23620/1/Properties%20of%20zinc%20tin%20oxide%20thin%20film%20by%20aerosol%20assisted%20chemical%20vapor%20deposition.pdf
https://eprints.ums.edu.my/id/eprint/23620/
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spelling my.ums.eprints.236202019-09-20T07:19:21Z https://eprints.ums.edu.my/id/eprint/23620/ Properties of zinc tin oxide thin film by aerosol assisted chemical vapor deposition (AACVD) Muhammad Arif Riza Abu Bakar Abd Rahman Suhaila Sepeai Norasikin Ahmad Ludin Mohd Asri Mat Teridi Mohd Adib Ibrahim TP Chemical technology This study focuses on the properties of ZTO which have been deposited by a low-cost method namely aerosol assisted chemical vapor deposition (AACVD). The precursors used in this method were zinc acetate dihidrate and tin chloride dihydrate for ZTO thin film deposition. Both precursors were mixed and stirred until fully dissolved before deposition. The ZTO was deposited on borosilicate glass substrate for the investigation of optical properties. The films deposited have passed the scotch tape adherence test. XRD revealed that the crystal ZTO is slightly in the form of perovskite structure but several deteriorations were also seen in the spectrum. The UV-Vis analysis showed high transmittance of ∼85% and the band gap was calculated to be 3.85 eV. The average thickness of the film is around 284 nm. The results showed that the ZTO thin films have been successfully deposited by the utilization of AACVD method. 2018-05-09 Article PeerReviewed text en https://eprints.ums.edu.my/id/eprint/23620/1/Properties%20of%20zinc%20tin%20oxide%20thin%20film%20by%20aerosol%20assisted%20chemical%20vapor%20deposition.pdf Muhammad Arif Riza and Abu Bakar Abd Rahman and Suhaila Sepeai and Norasikin Ahmad Ludin and Mohd Asri Mat Teridi and Mohd Adib Ibrahim (2018) Properties of zinc tin oxide thin film by aerosol assisted chemical vapor deposition (AACVD). AIP Conference Proceedings, 1958 (1). pp. 1-7.
institution Universiti Malaysia Sabah
building UMS Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Sabah
content_source UMS Institutional Repository
url_provider http://eprints.ums.edu.my/
language English
topic TP Chemical technology
spellingShingle TP Chemical technology
Muhammad Arif Riza
Abu Bakar Abd Rahman
Suhaila Sepeai
Norasikin Ahmad Ludin
Mohd Asri Mat Teridi
Mohd Adib Ibrahim
Properties of zinc tin oxide thin film by aerosol assisted chemical vapor deposition (AACVD)
description This study focuses on the properties of ZTO which have been deposited by a low-cost method namely aerosol assisted chemical vapor deposition (AACVD). The precursors used in this method were zinc acetate dihidrate and tin chloride dihydrate for ZTO thin film deposition. Both precursors were mixed and stirred until fully dissolved before deposition. The ZTO was deposited on borosilicate glass substrate for the investigation of optical properties. The films deposited have passed the scotch tape adherence test. XRD revealed that the crystal ZTO is slightly in the form of perovskite structure but several deteriorations were also seen in the spectrum. The UV-Vis analysis showed high transmittance of ∼85% and the band gap was calculated to be 3.85 eV. The average thickness of the film is around 284 nm. The results showed that the ZTO thin films have been successfully deposited by the utilization of AACVD method.
format Article
author Muhammad Arif Riza
Abu Bakar Abd Rahman
Suhaila Sepeai
Norasikin Ahmad Ludin
Mohd Asri Mat Teridi
Mohd Adib Ibrahim
author_facet Muhammad Arif Riza
Abu Bakar Abd Rahman
Suhaila Sepeai
Norasikin Ahmad Ludin
Mohd Asri Mat Teridi
Mohd Adib Ibrahim
author_sort Muhammad Arif Riza
title Properties of zinc tin oxide thin film by aerosol assisted chemical vapor deposition (AACVD)
title_short Properties of zinc tin oxide thin film by aerosol assisted chemical vapor deposition (AACVD)
title_full Properties of zinc tin oxide thin film by aerosol assisted chemical vapor deposition (AACVD)
title_fullStr Properties of zinc tin oxide thin film by aerosol assisted chemical vapor deposition (AACVD)
title_full_unstemmed Properties of zinc tin oxide thin film by aerosol assisted chemical vapor deposition (AACVD)
title_sort properties of zinc tin oxide thin film by aerosol assisted chemical vapor deposition (aacvd)
publishDate 2018
url https://eprints.ums.edu.my/id/eprint/23620/1/Properties%20of%20zinc%20tin%20oxide%20thin%20film%20by%20aerosol%20assisted%20chemical%20vapor%20deposition.pdf
https://eprints.ums.edu.my/id/eprint/23620/
_version_ 1760230131884883968
score 13.211869

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