Properties of zinc tin oxide thin film by aerosol assisted chemical vapor deposition (AACVD)
This study focuses on the properties of ZTO which have been deposited by a low-cost method namely aerosol assisted chemical vapor deposition (AACVD). The precursors used in this method were zinc acetate dihidrate and tin chloride dihydrate for ZTO thin film deposition. Both precursors were mixed and...
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Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
2018
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Subjects: | |
Online Access: | https://eprints.ums.edu.my/id/eprint/23620/1/Properties%20of%20zinc%20tin%20oxide%20thin%20film%20by%20aerosol%20assisted%20chemical%20vapor%20deposition.pdf https://eprints.ums.edu.my/id/eprint/23620/ |
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