An attention-augmented convolutional neural network with focal loss for mixed-type wafer defect classification
Silicon wafer defect classification is crucial for improving fabrication and chip production. Although deep learning methods have been successful in single-defect wafer classification, the increasing complexity of the fabrication process has introduced the challenge of multiple defects on wafers, wh...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2023
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| Subjects: | |
| Online Access: | http://umpir.ump.edu.my/id/eprint/40649/1/An%20attention-augmented%20convolutional%20neural%20network.pdf http://umpir.ump.edu.my/id/eprint/40649/ https://doi.org/10.1109/ACCESS.2023.3321025 https://doi.org/10.1109/ACCESS.2023.3321025 |
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