Design of high force density fishbone-shaped electrostatic actuator using finite element / Megat Muhammad Ikhsan Megat Hasnan
This study presents the design and evaluation of high force density fishbone shaped electrostatic comb drive actuator. The fishbone shaped comb drive actuator has structure similar to fishbone, which is intended to increase the capacitance of the electrodes, and hence increase the electrostatic a...
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis |
| Published: |
2014
|
| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/8736/6/KGA120043.pdf http://studentsrepo.um.edu.my/8736/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Summary: | This study presents the design and evaluation of high force density fishbone shaped
electrostatic comb drive actuator. The fishbone shaped comb drive actuator has structure similar
to fishbone, which is intended to increase the capacitance of the electrodes, and hence increase
the electrostatic actuation force. Two-dimensional finite element analysis was used to simulate
the motion of the fishbone shaped electrostatic comb drive actuator, and compared against the
performance of a straight sided electrostatic comb drive actuator. The performances of both
designs are compared by evaluating the displacement and electrostatic force for both systems.
For both cases, the active area and the minimum gap distance between the two electrodes were
kept constant. Performance comparison of the fishbone shaped electrostatic comb driver and
straight finger electrostatic comb driver are demonstrated with an active area of 800x300 μm2,
which contained 16 fingers of fishbone shaped actuators and 40 fingers of straight sided
actuators, respectively. Through the modeling and simulation, improvement of drive force of the
fishbone shaped electrostatic comb driver is approximately 485% compared to the straight comb
finger of conventional electrostatic comb driver. These results indicate that the fishbone actuator
design provides good potential for applications as high force density electrostatic micro actuator
in MEMS systems. The fishbone shaped comb driver introduced in this work shows a
characteristic stepped force profile versus finger engagement compared to the conventional
straight sided comb driver. However, a cogging effect was demonstrated, due to the negative
force components of the fishbone shaped comb driver. So, a finger shifting method in comb
arrays was introduced to mitigate the negative force profile, in order to ensure more linear
electrostatic force profile.
|
|---|