Samarium oxide and samarium oxynitride thin film gate oxides on silicon substrate / Goh Kian Heng
Sputtered pure samarium (Sm) metal films on silicon substrates were thermally oxidized and oxynitrided at various temperatures (600 – 900 °C) and durations (5 – 20 min). Effects of thermal oxidation ambient in oxygen (O2) and nitrous oxide (N2O) gas ambient on the physical and electrical properti...
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis |
| Published: |
2017
|
| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/7132/4/kian_heng.pdf http://studentsrepo.um.edu.my/7132/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Be the first to leave a comment!