Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing
Thermoelectrochemical cells (TECs) are an alternative with potential for micro-power generator applications but is rarely fabricated using semiconductor processes or micro-fabrication technology. This study initiates fabrication of a Si-based TEC cell device using micro-fabrication technology. The i...
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my.um.eprints.343692022-09-13T07:29:20Z http://eprints.um.edu.my/34369/ Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing Megat Hasnan, M. M. Nayan, N. Ahmad, M. K. Mohd Zin, R. Fhong, S. C. Suhana, Mohd Said Mohamed Ali, M. S. Mohd Sabri, M. F. Mohamad, K. A. Mohd Salleh, M. F. QC Physics TK Electrical engineering. Electronics Nuclear engineering Thermoelectrochemical cells (TECs) are an alternative with potential for micro-power generator applications but is rarely fabricated using semiconductor processes or micro-fabrication technology. This study initiates fabrication of a Si-based TEC cell device using micro-fabrication technology. The iodide/triiodide poly(vinyl alcohol) hydrogel polymer electrolyte, and citric acid as supporting electrolyte, is selected as the TEC material. A platinum electrode sputtered on a silicon substrate is used as the hot and cold electrode. The TEC voltage generation that is based on Soret diffusion and the Seebeck effect shows good repeatability and stability. The magnitude of the power density shows dependence on the device electrode separation and temperature difference. At 10 mm electrode separation and a temperature difference of 30 K, the Si substrate TEC is able to produce 310 mu W m(-2); thus, it shows high potential as a low heat waste Si-based TEC power generator. Institute of Physics Article PeerReviewed Megat Hasnan, M. M. and Nayan, N. and Ahmad, M. K. and Mohd Zin, R. and Fhong, S. C. and Suhana, Mohd Said and Mohamed Ali, M. S. and Mohd Sabri, M. F. and Mohamad, K. A. and Mohd Salleh, M. F. Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing. Semiconductor Science and Technology, 36 (11). ISSN 0268-1242, DOI https://doi.org/10.1088/1361-6641/ac22f3 <https://doi.org/10.1088/1361-6641/ac22f3>. 10.1088/1361-6641/ac22f3 |
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QC Physics TK Electrical engineering. Electronics Nuclear engineering Megat Hasnan, M. M. Nayan, N. Ahmad, M. K. Mohd Zin, R. Fhong, S. C. Suhana, Mohd Said Mohamed Ali, M. S. Mohd Sabri, M. F. Mohamad, K. A. Mohd Salleh, M. F. Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing |
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Thermoelectrochemical cells (TECs) are an alternative with potential for micro-power generator applications but is rarely fabricated using semiconductor processes or micro-fabrication technology. This study initiates fabrication of a Si-based TEC cell device using micro-fabrication technology. The iodide/triiodide poly(vinyl alcohol) hydrogel polymer electrolyte, and citric acid as supporting electrolyte, is selected as the TEC material. A platinum electrode sputtered on a silicon substrate is used as the hot and cold electrode. The TEC voltage generation that is based on Soret diffusion and the Seebeck effect shows good repeatability and stability. The magnitude of the power density shows dependence on the device electrode separation and temperature difference. At 10 mm electrode separation and a temperature difference of 30 K, the Si substrate TEC is able to produce 310 mu W m(-2); thus, it shows high potential as a low heat waste Si-based TEC power generator. |
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Megat Hasnan, M. M. Nayan, N. Ahmad, M. K. Mohd Zin, R. Fhong, S. C. Suhana, Mohd Said Mohamed Ali, M. S. Mohd Sabri, M. F. Mohamad, K. A. Mohd Salleh, M. F. |
author_facet |
Megat Hasnan, M. M. Nayan, N. Ahmad, M. K. Mohd Zin, R. Fhong, S. C. Suhana, Mohd Said Mohamed Ali, M. S. Mohd Sabri, M. F. Mohamad, K. A. Mohd Salleh, M. F. |
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Megat Hasnan, M. M. |
title |
Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing |
title_short |
Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing |
title_full |
Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing |
title_fullStr |
Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing |
title_full_unstemmed |
Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing |
title_sort |
investigation of si-based thermoelectrochemical cells (tecs) towards semiconductor fabrication and processing |
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Institute of Physics |
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http://eprints.um.edu.my/34369/ |
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