Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing

Thermoelectrochemical cells (TECs) are an alternative with potential for micro-power generator applications but is rarely fabricated using semiconductor processes or micro-fabrication technology. This study initiates fabrication of a Si-based TEC cell device using micro-fabrication technology. The i...

Full description

Saved in:
Bibliographic Details
Main Authors: Megat Hasnan, M. M., Nayan, N., Ahmad, M. K., Mohd Zin, R., Fhong, S. C., Suhana, Mohd Said, Mohamed Ali, M. S., Mohd Sabri, M. F., Mohamad, K. A., Mohd Salleh, M. F.
Format: Article
Published: Institute of Physics
Subjects:
Online Access:http://eprints.um.edu.my/34369/
Tags: Add Tag
No Tags, Be the first to tag this record!
id my.um.eprints.34369
record_format eprints
spelling my.um.eprints.343692022-09-13T07:29:20Z http://eprints.um.edu.my/34369/ Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing Megat Hasnan, M. M. Nayan, N. Ahmad, M. K. Mohd Zin, R. Fhong, S. C. Suhana, Mohd Said Mohamed Ali, M. S. Mohd Sabri, M. F. Mohamad, K. A. Mohd Salleh, M. F. QC Physics TK Electrical engineering. Electronics Nuclear engineering Thermoelectrochemical cells (TECs) are an alternative with potential for micro-power generator applications but is rarely fabricated using semiconductor processes or micro-fabrication technology. This study initiates fabrication of a Si-based TEC cell device using micro-fabrication technology. The iodide/triiodide poly(vinyl alcohol) hydrogel polymer electrolyte, and citric acid as supporting electrolyte, is selected as the TEC material. A platinum electrode sputtered on a silicon substrate is used as the hot and cold electrode. The TEC voltage generation that is based on Soret diffusion and the Seebeck effect shows good repeatability and stability. The magnitude of the power density shows dependence on the device electrode separation and temperature difference. At 10 mm electrode separation and a temperature difference of 30 K, the Si substrate TEC is able to produce 310 mu W m(-2); thus, it shows high potential as a low heat waste Si-based TEC power generator. Institute of Physics Article PeerReviewed Megat Hasnan, M. M. and Nayan, N. and Ahmad, M. K. and Mohd Zin, R. and Fhong, S. C. and Suhana, Mohd Said and Mohamed Ali, M. S. and Mohd Sabri, M. F. and Mohamad, K. A. and Mohd Salleh, M. F. Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing. Semiconductor Science and Technology, 36 (11). ISSN 0268-1242, DOI https://doi.org/10.1088/1361-6641/ac22f3 <https://doi.org/10.1088/1361-6641/ac22f3>. 10.1088/1361-6641/ac22f3
institution Universiti Malaya
building UM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaya
content_source UM Research Repository
url_provider http://eprints.um.edu.my/
topic QC Physics
TK Electrical engineering. Electronics Nuclear engineering
spellingShingle QC Physics
TK Electrical engineering. Electronics Nuclear engineering
Megat Hasnan, M. M.
Nayan, N.
Ahmad, M. K.
Mohd Zin, R.
Fhong, S. C.
Suhana, Mohd Said
Mohamed Ali, M. S.
Mohd Sabri, M. F.
Mohamad, K. A.
Mohd Salleh, M. F.
Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing
description Thermoelectrochemical cells (TECs) are an alternative with potential for micro-power generator applications but is rarely fabricated using semiconductor processes or micro-fabrication technology. This study initiates fabrication of a Si-based TEC cell device using micro-fabrication technology. The iodide/triiodide poly(vinyl alcohol) hydrogel polymer electrolyte, and citric acid as supporting electrolyte, is selected as the TEC material. A platinum electrode sputtered on a silicon substrate is used as the hot and cold electrode. The TEC voltage generation that is based on Soret diffusion and the Seebeck effect shows good repeatability and stability. The magnitude of the power density shows dependence on the device electrode separation and temperature difference. At 10 mm electrode separation and a temperature difference of 30 K, the Si substrate TEC is able to produce 310 mu W m(-2); thus, it shows high potential as a low heat waste Si-based TEC power generator.
format Article
author Megat Hasnan, M. M.
Nayan, N.
Ahmad, M. K.
Mohd Zin, R.
Fhong, S. C.
Suhana, Mohd Said
Mohamed Ali, M. S.
Mohd Sabri, M. F.
Mohamad, K. A.
Mohd Salleh, M. F.
author_facet Megat Hasnan, M. M.
Nayan, N.
Ahmad, M. K.
Mohd Zin, R.
Fhong, S. C.
Suhana, Mohd Said
Mohamed Ali, M. S.
Mohd Sabri, M. F.
Mohamad, K. A.
Mohd Salleh, M. F.
author_sort Megat Hasnan, M. M.
title Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing
title_short Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing
title_full Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing
title_fullStr Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing
title_full_unstemmed Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing
title_sort investigation of si-based thermoelectrochemical cells (tecs) towards semiconductor fabrication and processing
publisher Institute of Physics
url http://eprints.um.edu.my/34369/
_version_ 1744649175215112192
score 13.211869