Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing
Thermoelectrochemical cells (TECs) are an alternative with potential for micro-power generator applications but is rarely fabricated using semiconductor processes or micro-fabrication technology. This study initiates fabrication of a Si-based TEC cell device using micro-fabrication technology. The i...
Saved in:
| Main Authors: | , , , , , , , , , |
|---|---|
| Format: | Article |
| Published: |
Institute of Physics
|
| Subjects: | |
| Online Access: | http://eprints.um.edu.my/34369/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|