Effects of pressure and substrate temperature on the growth of Al-doped ZnO films by pulsed laser deposition
Al-doped ZnO (AZO) thin films were deposited on p-Si (100) by pulsed laser deposition from a composite ceramic target (ZnO:Al2O3) by using 355 nm laser at different O2 background pressure and substrate temperature. Upon ablation at laser fluence of 2 Jcm-2, plasma plume consists of Zn neutrals and i...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Published: |
IOP Publishing
2020
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/24216/ https://doi.org/10.1088/2053-1591/ab62f8 |
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