Design of a pressure controller for a thermal evaporation system: article / Ahmad Suffian Muhammad
This project describes the method of designing a pressure controller for vacuum pressure control system well suit for evaporation and deposition of amorphous silicon thin film. The constant total pressure or pressure not less than I 0·5 torr is required during the conditioning of the vacuum to contr...
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| Format: | Article |
| Language: | English |
| Published: |
Universiti Teknologi MARA (UiTM)
2009
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| Online Access: | https://ir.uitm.edu.my/id/eprint/63676/1/63676.PDF https://ir.uitm.edu.my/id/eprint/63676/ |
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