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Design of a pressure controller for a thermal evaporation system: article / Ahmad Suffian Muhammad

This project describes the method of designing a pressure controller for vacuum pressure control system well suit for evaporation and deposition of amorphous silicon thin film. The constant total pressure or pressure not less than I 0·5 torr is required during the conditioning of the vacuum to contr...

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Main Author: Muhammad, Ahmad Suffian
Format: Article
Language:English
Published: Universiti Teknologi MARA (UiTM) 2009
Online Access:https://ir.uitm.edu.my/id/eprint/63676/1/63676.PDF
https://ir.uitm.edu.my/id/eprint/63676/
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spelling my.uitm.ir.636762024-06-21T07:06:33Z https://ir.uitm.edu.my/id/eprint/63676/ Design of a pressure controller for a thermal evaporation system: article / Ahmad Suffian Muhammad Muhammad, Ahmad Suffian This project describes the method of designing a pressure controller for vacuum pressure control system well suit for evaporation and deposition of amorphous silicon thin film. The constant total pressure or pressure not less than I 0·5 torr is required during the conditioning of the vacuum to control impurity in high temperature. The pressure controller was designed to maintain the constant total gas pressure inside vacuum chamber. This controller consists of pressure sensor circuit and relay switching which. The pressure inside the chamber will detect by using the vacuum sensor which also known as pressure sensor. The pressure sensor also as the transducer gives the signal to the pressure sensor circuit. The pressure sensor circuit will provide the signal that used by relay switching circuit to switch off the pump operation. The circuit was designed and simulated by using OrCAD PSpice software. After analysis and simulation, the circuit was successful designed to amplify the low level voltage to the high level voltage. The combination of pressure sensor circuit and a relay switching will yields a pressure controller, which is to control the pressure inside the vacuum chamber Universiti Teknologi MARA (UiTM) 2009 Article PeerReviewed text en https://ir.uitm.edu.my/id/eprint/63676/1/63676.PDF Design of a pressure controller for a thermal evaporation system: article / Ahmad Suffian Muhammad. (2009) pp. 1-6.
institution Universiti Teknologi Mara
building Tun Abdul Razak Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Mara
content_source UiTM Institutional Repository
url_provider http://ir.uitm.edu.my/
language English
description This project describes the method of designing a pressure controller for vacuum pressure control system well suit for evaporation and deposition of amorphous silicon thin film. The constant total pressure or pressure not less than I 0·5 torr is required during the conditioning of the vacuum to control impurity in high temperature. The pressure controller was designed to maintain the constant total gas pressure inside vacuum chamber. This controller consists of pressure sensor circuit and relay switching which. The pressure inside the chamber will detect by using the vacuum sensor which also known as pressure sensor. The pressure sensor also as the transducer gives the signal to the pressure sensor circuit. The pressure sensor circuit will provide the signal that used by relay switching circuit to switch off the pump operation. The circuit was designed and simulated by using OrCAD PSpice software. After analysis and simulation, the circuit was successful designed to amplify the low level voltage to the high level voltage. The combination of pressure sensor circuit and a relay switching will yields a pressure controller, which is to control the pressure inside the vacuum chamber
format Article
author Muhammad, Ahmad Suffian
spellingShingle Muhammad, Ahmad Suffian
Design of a pressure controller for a thermal evaporation system: article / Ahmad Suffian Muhammad
author_facet Muhammad, Ahmad Suffian
author_sort Muhammad, Ahmad Suffian
title Design of a pressure controller for a thermal evaporation system: article / Ahmad Suffian Muhammad
title_short Design of a pressure controller for a thermal evaporation system: article / Ahmad Suffian Muhammad
title_full Design of a pressure controller for a thermal evaporation system: article / Ahmad Suffian Muhammad
title_fullStr Design of a pressure controller for a thermal evaporation system: article / Ahmad Suffian Muhammad
title_full_unstemmed Design of a pressure controller for a thermal evaporation system: article / Ahmad Suffian Muhammad
title_sort design of a pressure controller for a thermal evaporation system: article / ahmad suffian muhammad
publisher Universiti Teknologi MARA (UiTM)
publishDate 2009
url https://ir.uitm.edu.my/id/eprint/63676/1/63676.PDF
https://ir.uitm.edu.my/id/eprint/63676/
_version_ 1802981075931103232
score 13.211869

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