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Piezoelectric characteristics of CMOS compatible AIN SAW resonators

In this work, we predict the surface acoustic wave characteristics by 2D COMSOL finite element modeling. The dispersion of simulated acoustic mode shapes, acoustic phase velocity and coupling coefficient were performed on a CMOS-compatible 1.4 GHz SAW resonator. C-axis oriented Aluminium Nitride (AI...

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Main Authors:	Md Ralib @ Md Raghib, Aliza 'Aini, Pandian, Mohanraj Saundara, Ferrer, Eloi Mariago, Song, Charlie TayWee, Shunmugam, Muniandy, Zainuddin, Ahmad Anwar, Nordin, Anis Nurashikin
格式:	Conference or Workshop Item
语言:	English English
出版:	2014
主题:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
在线阅读:	http://irep.iium.edu.my/45296/1/45296.pdf http://irep.iium.edu.my/45296/4/45296_Piezoelectric%20characteristics%20of%20CMOS.SCOPUS.pdf http://irep.iium.edu.my/45296/ http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=7067949&tag=1
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