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Piezoelectric characteristics of CMOS compatible AIN SAW resonators

In this work, we predict the surface acoustic wave characteristics by 2D COMSOL finite element modeling. The dispersion of simulated acoustic mode shapes, acoustic phase velocity and coupling coefficient were performed on a CMOS-compatible 1.4 GHz SAW resonator. C-axis oriented Aluminium Nitride (AI...

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Main Authors:	Md Ralib @ Md Raghib, Aliza 'Aini, Pandian, Mohanraj Saundara, Ferrer, Eloi Mariago, Song, Charlie TayWee, Shunmugam, Muniandy, Zainuddin, Ahmad Anwar, Nordin, Anis Nurashikin
Format:	Conference or Workshop Item
Language:	English English
Published:	2014
Subjects:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/45296/1/45296.pdf http://irep.iium.edu.my/45296/4/45296_Piezoelectric%20characteristics%20of%20CMOS.SCOPUS.pdf http://irep.iium.edu.my/45296/ http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=7067949&tag=1
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spelling	my.iium.irep.452962017-09-27T04:17:32Z http://irep.iium.edu.my/45296/ Piezoelectric characteristics of CMOS compatible AIN SAW resonators Md Ralib @ Md Raghib, Aliza 'Aini Pandian, Mohanraj Saundara Ferrer, Eloi Mariago Song, Charlie TayWee Shunmugam, Muniandy Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices In this work, we predict the surface acoustic wave characteristics by 2D COMSOL finite element modeling. The dispersion of simulated acoustic mode shapes, acoustic phase velocity and coupling coefficient were performed on a CMOS-compatible 1.4 GHz SAW resonator. C-axis oriented Aluminium Nitride (AIN) was chosen as the piezoelectric material due to its compatibility with CMOS technology and higher phase velocity. The influences of AIN thickness on electromechanical coupling coefficient and phase velocity are discussed. High acoustic velocities (v∼5220 m/s) and coupling factors (k2∼0.19%) can be observed for SAW resonator with khAIN∼ 3.9. The measurement results are found to be consistent with FEM results with deviation less than 6% for resonance frequency and phase velocity. 2014 Conference or Workshop Item REM application/pdf en http://irep.iium.edu.my/45296/1/45296.pdf application/pdf en http://irep.iium.edu.my/45296/4/45296_Piezoelectric%20characteristics%20of%20CMOS.SCOPUS.pdf Md Ralib @ Md Raghib, Aliza 'Aini and Pandian, Mohanraj Saundara and Ferrer, Eloi Mariago and Song, Charlie TayWee and Shunmugam, Muniandy and Zainuddin, Ahmad Anwar and Nordin, Anis Nurashikin (2014) Piezoelectric characteristics of CMOS compatible AIN SAW resonators. In: 2014 Asia-Pacific Microwave Conference (APMC 2014), 4th-7th Nov 2014, Sendai, Japan. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=7067949&tag=1
institution	Universiti Islam Antarabangsa Malaysia
building	IIUM Library
collection	Institutional Repository
continent	Asia
country	Malaysia
content_provider	International Islamic University Malaysia
content_source	IIUM Repository (IREP)
url_provider	http://irep.iium.edu.my/
language	English English
topic	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
spellingShingle	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices Md Ralib @ Md Raghib, Aliza 'Aini Pandian, Mohanraj Saundara Ferrer, Eloi Mariago Song, Charlie TayWee Shunmugam, Muniandy Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin Piezoelectric characteristics of CMOS compatible AIN SAW resonators
description	In this work, we predict the surface acoustic wave characteristics by 2D COMSOL finite element modeling. The dispersion of simulated acoustic mode shapes, acoustic phase velocity and coupling coefficient were performed on a CMOS-compatible 1.4 GHz SAW resonator. C-axis oriented Aluminium Nitride (AIN) was chosen as the piezoelectric material due to its compatibility with CMOS technology and higher phase velocity. The influences of AIN thickness on electromechanical coupling coefficient and phase velocity are discussed. High acoustic velocities (v∼5220 m/s) and coupling factors (k2∼0.19%) can be observed for SAW resonator with khAIN∼ 3.9. The measurement results are found to be consistent with FEM results with deviation less than 6% for resonance frequency and phase velocity.
format	Conference or Workshop Item
author	Md Ralib @ Md Raghib, Aliza 'Aini Pandian, Mohanraj Saundara Ferrer, Eloi Mariago Song, Charlie TayWee Shunmugam, Muniandy Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin
author_facet	Md Ralib @ Md Raghib, Aliza 'Aini Pandian, Mohanraj Saundara Ferrer, Eloi Mariago Song, Charlie TayWee Shunmugam, Muniandy Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin
author_sort	Md Ralib @ Md Raghib, Aliza 'Aini
title	Piezoelectric characteristics of CMOS compatible AIN SAW resonators
title_short	Piezoelectric characteristics of CMOS compatible AIN SAW resonators
title_full	Piezoelectric characteristics of CMOS compatible AIN SAW resonators
title_fullStr	Piezoelectric characteristics of CMOS compatible AIN SAW resonators
title_full_unstemmed	Piezoelectric characteristics of CMOS compatible AIN SAW resonators
title_sort	piezoelectric characteristics of cmos compatible ain saw resonators
publishDate	2014
url	http://irep.iium.edu.my/45296/1/45296.pdf http://irep.iium.edu.my/45296/4/45296_Piezoelectric%20characteristics%20of%20CMOS.SCOPUS.pdf http://irep.iium.edu.my/45296/ http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=7067949&tag=1
_version_	1643612761816563712
score	13.211869

Piezoelectric characteristics of CMOS compatible AIN SAW resonators

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