Performance analysis of zinc oxide piezoelectric MEMS energy harvester
This paper presents the design and analysis of MEMS piezoelectric energy harvester. Zinc oxide (ZnO) MEMS piezoelectric energy harvester has been utilized as piezoelectrically active cantilever for mechanical to electrical transduction. A COMSOL Multiphysics model was used which provide accurate inf...
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Main Authors: | , , |
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Format: | Conference or Workshop Item |
Language: | English English |
Published: |
2014
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Subjects: | |
Online Access: | http://irep.iium.edu.my/39598/1/icse2014_published.pdf http://irep.iium.edu.my/39598/4/39598_Performance%20analysis%20of%20zinc%20oxide.SCOPUS.pdf http://irep.iium.edu.my/39598/ http://ieeexplore.ieee.org |
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