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Performance analysis of zinc oxide piezoelectric MEMS energy harvester

This paper presents the design and analysis of MEMS piezoelectric energy harvester. Zinc oxide (ZnO) MEMS piezoelectric energy harvester has been utilized as piezoelectrically active cantilever for mechanical to electrical transduction. A COMSOL Multiphysics model was used which provide accurate inf...

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Main Authors: Jamain, Umi Milhana, Ibrahim, Nur Hidayah, Ab Rahim, Rosminazuin
Format: Conference or Workshop Item
Language:English
English
Published: 2014
Subjects:
T Technology (General)
Online Access:http://irep.iium.edu.my/39598/1/icse2014_published.pdf
http://irep.iium.edu.my/39598/4/39598_Performance%20analysis%20of%20zinc%20oxide.SCOPUS.pdf
http://irep.iium.edu.my/39598/
http://ieeexplore.ieee.org
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spelling my.iium.irep.395982017-09-26T08:49:09Z http://irep.iium.edu.my/39598/ Performance analysis of zinc oxide piezoelectric MEMS energy harvester Jamain, Umi Milhana Ibrahim, Nur Hidayah Ab Rahim, Rosminazuin T Technology (General) This paper presents the design and analysis of MEMS piezoelectric energy harvester. Zinc oxide (ZnO) MEMS piezoelectric energy harvester has been utilized as piezoelectrically active cantilever for mechanical to electrical transduction. A COMSOL Multiphysics model was used which provide accurate information on the frequency, stress and voltage output of a ZnO piezoelectric energy harvester. Few design parameters have been studied which are rectangular cantilever, triangular cantilever, rectangular cantilever with proof mass and using different types of piezoelectric materials. The effects of varying geometrical dimensions of the device were also investigated. From simulation results, it was found out that ZnO piezoelectric energy harvester with the length of 150 μm, width 50 μm and thickness of 4 μm generates 9.9184 V electric potential under the resonance frequency of 0.71 MHz and 1 μN/m2 mechanical force applied. 2014 Conference or Workshop Item REM application/pdf en http://irep.iium.edu.my/39598/1/icse2014_published.pdf application/pdf en http://irep.iium.edu.my/39598/4/39598_Performance%20analysis%20of%20zinc%20oxide.SCOPUS.pdf Jamain, Umi Milhana and Ibrahim, Nur Hidayah and Ab Rahim, Rosminazuin (2014) Performance analysis of zinc oxide piezoelectric MEMS energy harvester. In: IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE, 27th-29th Aug 2014, Kuala Lumpur. http://ieeexplore.ieee.org
institution Universiti Islam Antarabangsa Malaysia
building IIUM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider International Islamic University Malaysia
content_source IIUM Repository (IREP)
url_provider http://irep.iium.edu.my/
language English
English
topic T Technology (General)
spellingShingle T Technology (General)
Jamain, Umi Milhana
Ibrahim, Nur Hidayah
Ab Rahim, Rosminazuin
Performance analysis of zinc oxide piezoelectric MEMS energy harvester
description This paper presents the design and analysis of MEMS piezoelectric energy harvester. Zinc oxide (ZnO) MEMS piezoelectric energy harvester has been utilized as piezoelectrically active cantilever for mechanical to electrical transduction. A COMSOL Multiphysics model was used which provide accurate information on the frequency, stress and voltage output of a ZnO piezoelectric energy harvester. Few design parameters have been studied which are rectangular cantilever, triangular cantilever, rectangular cantilever with proof mass and using different types of piezoelectric materials. The effects of varying geometrical dimensions of the device were also investigated. From simulation results, it was found out that ZnO piezoelectric energy harvester with the length of 150 μm, width 50 μm and thickness of 4 μm generates 9.9184 V electric potential under the resonance frequency of 0.71 MHz and 1 μN/m2 mechanical force applied.
format Conference or Workshop Item
author Jamain, Umi Milhana
Ibrahim, Nur Hidayah
Ab Rahim, Rosminazuin
author_facet Jamain, Umi Milhana
Ibrahim, Nur Hidayah
Ab Rahim, Rosminazuin
author_sort Jamain, Umi Milhana
title Performance analysis of zinc oxide piezoelectric MEMS energy harvester
title_short Performance analysis of zinc oxide piezoelectric MEMS energy harvester
title_full Performance analysis of zinc oxide piezoelectric MEMS energy harvester
title_fullStr Performance analysis of zinc oxide piezoelectric MEMS energy harvester
title_full_unstemmed Performance analysis of zinc oxide piezoelectric MEMS energy harvester
title_sort performance analysis of zinc oxide piezoelectric mems energy harvester
publishDate 2014
url http://irep.iium.edu.my/39598/1/icse2014_published.pdf
http://irep.iium.edu.my/39598/4/39598_Performance%20analysis%20of%20zinc%20oxide.SCOPUS.pdf
http://irep.iium.edu.my/39598/
http://ieeexplore.ieee.org
_version_ 1643611667984023552
score 13.211869

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