Piezoelectric thin films for double electrode CMOS MEMS surface acoustic wave (SAW) resonator
CMOS integration for RF-MEMS is desired to yield compact, low-power and portable devices. In this work, we illustrate the usage of double electrode CMOS SAW resonators using both ZnO and AlN as its piezoelectric material. Double electrode transducers were chosen, as they are better at suppressi...
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Springer Berlin / Heidelberg
2015
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my.iium.irep.392462016-04-15T09:35:42Z http://irep.iium.edu.my/39246/ Piezoelectric thin films for double electrode CMOS MEMS surface acoustic wave (SAW) resonator Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Alam, A. H. M. Zahirul Hashim, Uda Othman, Raihan TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices CMOS integration for RF-MEMS is desired to yield compact, low-power and portable devices. In this work, we illustrate the usage of double electrode CMOS SAW resonators using both ZnO and AlN as its piezoelectric material. Double electrode transducers were chosen, as they are better at suppressing undesired acoustic reflections compared to single electrodes. The structure and dimension of the device is based on 0.35 μm CMOS process where the IDTs are fabricated using standard CMOS fabrication process. 2D Finite element modeling of the CMOS SAW resonator using COMSOL Multiphysics® is presented. Two-step eigenfrequency and frequency domain analyses were performed. The acoustic velocities generated are 3,925 and 5,953 m/s for ZnO and AlN CMOS SAW resonator respectively. Higher acoustic displacement and surface potential were observed in ZnO compared to AlN. It can be concluded that ZnO thin films have higher electromechanical coupling coefficients and are more efficient than AlN thin films. Springer Berlin / Heidelberg 2015-09 Article REM application/pdf en http://irep.iium.edu.my/39246/7/39246_Piezoelectric_thin_films_for_double_electrode.pdf Md Ralib @ Md Raghib, Aliza 'Aini and Nordin, Anis Nurashikin and Alam, A. H. M. Zahirul and Hashim, Uda and Othman, Raihan (2015) Piezoelectric thin films for double electrode CMOS MEMS surface acoustic wave (SAW) resonator. Microsystems Technologies, 21. pp. 1931-1940. ISSN 0946-7076 (Print), 1432-1858 (Online) (In Press) http://download.springer.com/static/pdf/580/art%253A10.1007%252Fs00542-014-2319-0.pdf?auth66=1415949721_6a3204bd6b5e578de6b1553f69958025&ext=.pdf http://link.springer.com/article/10.1007%2Fs00542-014-2319-0 |
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Malaysia |
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International Islamic University Malaysia |
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| language |
English |
| topic |
TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices |
| spellingShingle |
TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Alam, A. H. M. Zahirul Hashim, Uda Othman, Raihan Piezoelectric thin films for double electrode CMOS MEMS surface acoustic wave (SAW) resonator |
| description |
CMOS integration for RF-MEMS is desired
to yield compact, low-power and portable devices. In this
work, we illustrate the usage of double electrode CMOS
SAW resonators using both ZnO and AlN as its piezoelectric
material. Double electrode transducers were chosen,
as they are better at suppressing undesired acoustic reflections
compared to single electrodes. The structure and
dimension of the device is based on 0.35 μm CMOS process
where the IDTs are fabricated using standard CMOS
fabrication process. 2D Finite element modeling of the
CMOS SAW resonator using COMSOL Multiphysics® is
presented. Two-step eigenfrequency and frequency domain
analyses were performed. The acoustic velocities generated
are 3,925 and 5,953 m/s for ZnO and AlN CMOS
SAW resonator respectively. Higher acoustic displacement
and surface potential were observed in ZnO compared to
AlN. It can be concluded that ZnO thin films have higher electromechanical coupling coefficients and are more efficient than AlN thin films. |
| format |
Article |
| author |
Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Alam, A. H. M. Zahirul Hashim, Uda Othman, Raihan |
| author_facet |
Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Alam, A. H. M. Zahirul Hashim, Uda Othman, Raihan |
| author_sort |
Md Ralib @ Md Raghib, Aliza 'Aini |
| title |
Piezoelectric thin films for double electrode CMOS MEMS surface acoustic wave (SAW) resonator |
| title_short |
Piezoelectric thin films for double electrode CMOS MEMS surface acoustic wave (SAW) resonator |
| title_full |
Piezoelectric thin films for double electrode CMOS MEMS surface acoustic wave (SAW) resonator |
| title_fullStr |
Piezoelectric thin films for double electrode CMOS MEMS surface acoustic wave (SAW) resonator |
| title_full_unstemmed |
Piezoelectric thin films for double electrode CMOS MEMS surface acoustic wave (SAW) resonator |
| title_sort |
piezoelectric thin films for double electrode cmos mems surface acoustic wave (saw) resonator |
| publisher |
Springer Berlin / Heidelberg |
| publishDate |
2015 |
| url |
http://irep.iium.edu.my/39246/7/39246_Piezoelectric_thin_films_for_double_electrode.pdf http://irep.iium.edu.my/39246/ http://download.springer.com/static/pdf/580/art%253A10.1007%252Fs00542-014-2319-0.pdf?auth66=1415949721_6a3204bd6b5e578de6b1553f69958025&ext=.pdf http://link.springer.com/article/10.1007%2Fs00542-014-2319-0 |
| _version_ |
1643611590431342592 |
| score |
13.251813 |