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Design and modeling of MEMS SAW resonator on Lithium Niobate

Surface Acoustic Wave (SAW) resonators are essential components for modern communication systems. They can function as filters and frequency synthesizers. SAW resonators operate based on the principle of acoustic waves propagating along the surface of a solid piezoelectric material. The waves are ge...

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Main Authors: Ramli, Noor Amalina, Nordin, Anis Nurashikin
Format: Conference or Workshop Item
Language:English
Published: 2011
Subjects:
TK7885 Computer engineering
Online Access:http://irep.iium.edu.my/3732/1/29.pdf
http://irep.iium.edu.my/3732/
http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5937127&tag=1
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spelling my.iium.irep.37322013-08-20T04:19:09Z http://irep.iium.edu.my/3732/ Design and modeling of MEMS SAW resonator on Lithium Niobate Ramli, Noor Amalina Nordin, Anis Nurashikin TK7885 Computer engineering Surface Acoustic Wave (SAW) resonators are essential components for modern communication systems. They can function as filters and frequency synthesizers. SAW resonators operate based on the principle of acoustic waves propagating along the surface of a solid piezoelectric material. The waves are generated by injecting electrical energy using interdigitated transducers (IDTs) into the piezoelectric material which transforms it into propagating mechanical waves. This project intends to study the key design parameters that affect the performance of SAW resonator such as optimum spacing between IDT and reflector, optimum spacing of IDTs and the numbers of reflector in order to get the highest mechanical displacement. Key requirements of a SAW resonator include having precise resonant frequency (fr), low insertion losses, and high quality factors (Q). To meet these requirements, it is necessary to investigate the key design parameters; number of reflectors, number of IDTs, periodic distance of transducer fingers ( #x03BB;), spacing between IDT and reflector. Finite element simulations to determine the optimum SAW resonator design was performed using COMSOL Multiphysics #x2122;. 2011-05 Conference or Workshop Item REM application/pdf en http://irep.iium.edu.my/3732/1/29.pdf Ramli, Noor Amalina and Nordin, Anis Nurashikin (2011) Design and modeling of MEMS SAW resonator on Lithium Niobate. In: 4th International Conference on Mechatronics: Integrated Engineering for Industrial and Societal Development (ICOM 2011), 17-19 May, 2011, Kuala Lumpur, Malaysia. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5937127&tag=1
institution Universiti Islam Antarabangsa Malaysia
building IIUM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider International Islamic University Malaysia
content_source IIUM Repository (IREP)
url_provider http://irep.iium.edu.my/
language English
topic TK7885 Computer engineering
spellingShingle TK7885 Computer engineering
Ramli, Noor Amalina
Nordin, Anis Nurashikin
Design and modeling of MEMS SAW resonator on Lithium Niobate
description Surface Acoustic Wave (SAW) resonators are essential components for modern communication systems. They can function as filters and frequency synthesizers. SAW resonators operate based on the principle of acoustic waves propagating along the surface of a solid piezoelectric material. The waves are generated by injecting electrical energy using interdigitated transducers (IDTs) into the piezoelectric material which transforms it into propagating mechanical waves. This project intends to study the key design parameters that affect the performance of SAW resonator such as optimum spacing between IDT and reflector, optimum spacing of IDTs and the numbers of reflector in order to get the highest mechanical displacement. Key requirements of a SAW resonator include having precise resonant frequency (fr), low insertion losses, and high quality factors (Q). To meet these requirements, it is necessary to investigate the key design parameters; number of reflectors, number of IDTs, periodic distance of transducer fingers ( #x03BB;), spacing between IDT and reflector. Finite element simulations to determine the optimum SAW resonator design was performed using COMSOL Multiphysics #x2122;.
format Conference or Workshop Item
author Ramli, Noor Amalina
Nordin, Anis Nurashikin
author_facet Ramli, Noor Amalina
Nordin, Anis Nurashikin
author_sort Ramli, Noor Amalina
title Design and modeling of MEMS SAW resonator on Lithium Niobate
title_short Design and modeling of MEMS SAW resonator on Lithium Niobate
title_full Design and modeling of MEMS SAW resonator on Lithium Niobate
title_fullStr Design and modeling of MEMS SAW resonator on Lithium Niobate
title_full_unstemmed Design and modeling of MEMS SAW resonator on Lithium Niobate
title_sort design and modeling of mems saw resonator on lithium niobate
publishDate 2011
url http://irep.iium.edu.my/3732/1/29.pdf
http://irep.iium.edu.my/3732/
http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5937127&tag=1
_version_ 1643605201567875072
score 13.211869

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