Fabrication of micromold cavity for microreplication: A review
In this paper, various fabrication techniques for micromold cavity are reviewed and discussed. Silicon and lithography based fabrication were being used for years for the fabrication of micromold cavity. In the later stage direct fabrication techniques such as focused ion beam, micro electro disc...
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| Main Authors: | , , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2008
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27157/1/048_ICME_2008_JB_MFG_ID-0127.pdf http://irep.iium.edu.my/27157/ |
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