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Fabrication of micromold cavity for microreplication: A review

In this paper, various fabrication techniques for micromold cavity are reviewed and discussed. Silicon and lithography based fabrication were being used for years for the fabrication of micromold cavity. In the later stage direct fabrication techniques such as focused ion beam, micro electro disc...

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Main Authors: Ali, Mohammad Yeakub, Khan, Ahsan Ali, Mehfuz, R., Aishah, S., Hayati, N., Hajar, N.
Format: Conference or Workshop Item
Language:English
Published: 2008
Subjects:
TS Manufactures
Online Access:http://irep.iium.edu.my/27157/1/048_ICME_2008_JB_MFG_ID-0127.pdf
http://irep.iium.edu.my/27157/
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spelling my.iium.irep.271572013-09-06T01:23:01Z http://irep.iium.edu.my/27157/ Fabrication of micromold cavity for microreplication: A review Ali, Mohammad Yeakub Khan, Ahsan Ali Mehfuz, R. Aishah, S. Hayati, N. Hajar, N. TS Manufactures In this paper, various fabrication techniques for micromold cavity are reviewed and discussed. Silicon and lithography based fabrication were being used for years for the fabrication of micromold cavity. In the later stage direct fabrication techniques such as focused ion beam, micro electro discharge machining, laser micromachining, tool based micromilling, etc., become cost effective and popular. These micromold cavities were used for mass production of microcomponents. The fabrication processes, advantages and disadvantages of these processes are discussed in this paper. The processes are also compared for the ease of process selection for a particular fabrication. 2008 Conference or Workshop Item REM application/pdf en http://irep.iium.edu.my/27157/1/048_ICME_2008_JB_MFG_ID-0127.pdf Ali, Mohammad Yeakub and Khan, Ahsan Ali and Mehfuz, R. and Aishah, S. and Hayati, N. and Hajar, N. (2008) Fabrication of micromold cavity for microreplication: A review. In: International Conference on Mechanical and Manufacturing Engineering (ICME 2008), 21-23 May 2008, Johor Bahru, Malaysia.
institution Universiti Islam Antarabangsa Malaysia
building IIUM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider International Islamic University Malaysia
content_source IIUM Repository (IREP)
url_provider http://irep.iium.edu.my/
language English
topic TS Manufactures
spellingShingle TS Manufactures
Ali, Mohammad Yeakub
Khan, Ahsan Ali
Mehfuz, R.
Aishah, S.
Hayati, N.
Hajar, N.
Fabrication of micromold cavity for microreplication: A review
description In this paper, various fabrication techniques for micromold cavity are reviewed and discussed. Silicon and lithography based fabrication were being used for years for the fabrication of micromold cavity. In the later stage direct fabrication techniques such as focused ion beam, micro electro discharge machining, laser micromachining, tool based micromilling, etc., become cost effective and popular. These micromold cavities were used for mass production of microcomponents. The fabrication processes, advantages and disadvantages of these processes are discussed in this paper. The processes are also compared for the ease of process selection for a particular fabrication.
format Conference or Workshop Item
author Ali, Mohammad Yeakub
Khan, Ahsan Ali
Mehfuz, R.
Aishah, S.
Hayati, N.
Hajar, N.
author_facet Ali, Mohammad Yeakub
Khan, Ahsan Ali
Mehfuz, R.
Aishah, S.
Hayati, N.
Hajar, N.
author_sort Ali, Mohammad Yeakub
title Fabrication of micromold cavity for microreplication: A review
title_short Fabrication of micromold cavity for microreplication: A review
title_full Fabrication of micromold cavity for microreplication: A review
title_fullStr Fabrication of micromold cavity for microreplication: A review
title_full_unstemmed Fabrication of micromold cavity for microreplication: A review
title_sort fabrication of micromold cavity for microreplication: a review
publishDate 2008
url http://irep.iium.edu.my/27157/1/048_ICME_2008_JB_MFG_ID-0127.pdf
http://irep.iium.edu.my/27157/
_version_ 1643609279633031168
score 13.211869

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