Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish
This paper discusses the fabrication of nanopillars using focused ion beam (FIB) sputtering. A 25 keV Ga+ FIB was used to machine the nanopillars. A reversed bitmap method was used to fabricate nanopillars where it milled the substrate all over except the nanopillar area. The height of the nanopilla...
Saved in:
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
Department of manufacturing and Materials,Kulliyyah of Engineering, IIUM
2010
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/2505/1/RMC_Book_Chapter_Fabrication_Nanopillar.pdf http://irep.iium.edu.my/2505/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Be the first to leave a comment!