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Corner compensation mask design on (MEMS) accelerometer structure

This paper presents the analysis effect of etching temperature and KOH concentration on convex corner undercutting of (MEMS) accelerometer structure. The lntellisuite CAD simulation software was used for the simulation analysis. From the analysis it was found that the optimum etching condition for t...

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書目詳細資料
Main Authors:	Norliana, Yusof, Che Wan Noorakma, Abdullah, Norhayati, Soin
格式:	Conference or Workshop Item
語言:	English
出版:	2014
主題:	QD Chemistry T Technology (General) TA Engineering (General). Civil engineering (General)
在線閱讀:	http://eprints.unisza.edu.my/374/1/FH03-FSTK-15-02446.jpg http://eprints.unisza.edu.my/374/
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