Corner compensation mask design on (MEMS) accelerometer structure
This paper presents the analysis effect of etching temperature and KOH concentration on convex corner undercutting of (MEMS) accelerometer structure. The lntellisuite CAD simulation software was used for the simulation analysis. From the analysis it was found that the optimum etching condition for t...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2014
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| Subjects: | |
| Online Access: | http://eprints.unisza.edu.my/374/1/FH03-FSTK-15-02446.jpg http://eprints.unisza.edu.my/374/ |
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