Corner compensation mask design on (MEMS) accelerometer structure
This paper presents the analysis effect of etching temperature and KOH concentration on convex corner undercutting of (MEMS) accelerometer structure. The lntellisuite CAD simulation software was used for the simulation analysis. From the analysis it was found that the optimum etching condition for t...
保存先:
| 主要な著者: | , , |
|---|---|
| フォーマット: | Conference or Workshop Item |
| 言語: | English |
| 出版事項: |
2014
|
| 主題: | |
| オンライン･アクセス: | http://eprints.unisza.edu.my/374/1/FH03-FSTK-15-02446.jpg http://eprints.unisza.edu.my/374/ |
| タグ: |
タグ追加
タグなし, このレコードへの初めてのタグを付けませんか!
|
