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Corner compensation mask design on (MEMS) accelerometer structure

This paper presents the analysis effect of etching temperature and KOH concentration on convex corner undercutting of (MEMS) accelerometer structure. The lntellisuite CAD simulation software was used for the simulation analysis. From the analysis it was found that the optimum etching condition for t...

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书目详细资料
Main Authors:	Norliana, Yusof, Che Wan Noorakma, Abdullah, Norhayati, Soin
格式:	Conference or Workshop Item
语言:	English
出版:	2014
主题:	QD Chemistry T Technology (General) TA Engineering (General). Civil engineering (General)
在线阅读:	http://eprints.unisza.edu.my/374/1/FH03-FSTK-15-02446.jpg http://eprints.unisza.edu.my/374/
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