Fabrication of amorphous silicon microgap structure for energy saving devices
We report here the fabrication of microgaps electrodes on amorphous silicon using low cost techniques such as vacuum deposition and conventional lithography. Amorphous silicon is a low cost material and has desirable properties for semiconductor applications. Microgap electrodes have important appli...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universiti Kebangsaan Malaysia
2012
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| Online Access: | http://journalarticle.ukm.my/4863/1/13%2520THS%2520Dhahi.pdf http://journalarticle.ukm.my/4863/ http://www.ukm.my/jsm/contents.html |
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