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Fabrication of amorphous silicon microgap structure for energy saving devices

We report here the fabrication of microgaps electrodes on amorphous silicon using low cost techniques such as vacuum deposition and conventional lithography. Amorphous silicon is a low cost material and has desirable properties for semiconductor applications. Microgap electrodes have important appli...

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Main Authors: Dhahi, T.H.S, Hashim, U, Ali, M.E, Nazwa, T
Format: Article
Language:English
Published: Universiti Kebangsaan Malaysia 2012
Online Access:http://journalarticle.ukm.my/4863/1/13%2520THS%2520Dhahi.pdf
http://journalarticle.ukm.my/4863/
http://www.ukm.my/jsm/contents.html
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spelling my-ukm.journal.48632016-12-14T06:37:09Z http://journalarticle.ukm.my/4863/ Fabrication of amorphous silicon microgap structure for energy saving devices Dhahi, T.H.S Hashim, U Ali, M.E Nazwa, T We report here the fabrication of microgaps electrodes on amorphous silicon using low cost techniques such as vacuum deposition and conventional lithography. Amorphous silicon is a low cost material and has desirable properties for semiconductor applications. Microgap electrodes have important applications in power saving devices, electrochemical sensors and dielectric detections of biomolecules. Physical characterization by scanning electron microscopy (SEM) demonstrated such microgap electrodes could be produced with high reproducibility and precision. Preliminary electrical characterizations showed such structures are able to maintain a good capacitance parameters and constant current supply over a wide ranging differences in voltages. They have also good efficiency of power consumption with high insulation properties. Universiti Kebangsaan Malaysia 2012-06 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/4863/1/13%2520THS%2520Dhahi.pdf Dhahi, T.H.S and Hashim, U and Ali, M.E and Nazwa, T (2012) Fabrication of amorphous silicon microgap structure for energy saving devices. Sains Malaysiana, 41 (6). pp. 755-759. ISSN 0126-6039 http://www.ukm.my/jsm/contents.html
institution Universiti Kebangsaan Malaysia
building Perpustakaan Tun Sri Lanang Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Kebangsaan Malaysia
content_source UKM Journal Article Repository
url_provider http://journalarticle.ukm.my/
language English
description We report here the fabrication of microgaps electrodes on amorphous silicon using low cost techniques such as vacuum deposition and conventional lithography. Amorphous silicon is a low cost material and has desirable properties for semiconductor applications. Microgap electrodes have important applications in power saving devices, electrochemical sensors and dielectric detections of biomolecules. Physical characterization by scanning electron microscopy (SEM) demonstrated such microgap electrodes could be produced with high reproducibility and precision. Preliminary electrical characterizations showed such structures are able to maintain a good capacitance parameters and constant current supply over a wide ranging differences in voltages. They have also good efficiency of power consumption with high insulation properties.
format Article
author Dhahi, T.H.S
Hashim, U
Ali, M.E
Nazwa, T
spellingShingle Dhahi, T.H.S
Hashim, U
Ali, M.E
Nazwa, T
Fabrication of amorphous silicon microgap structure for energy saving devices
author_facet Dhahi, T.H.S
Hashim, U
Ali, M.E
Nazwa, T
author_sort Dhahi, T.H.S
title Fabrication of amorphous silicon microgap structure for energy saving devices
title_short Fabrication of amorphous silicon microgap structure for energy saving devices
title_full Fabrication of amorphous silicon microgap structure for energy saving devices
title_fullStr Fabrication of amorphous silicon microgap structure for energy saving devices
title_full_unstemmed Fabrication of amorphous silicon microgap structure for energy saving devices
title_sort fabrication of amorphous silicon microgap structure for energy saving devices
publisher Universiti Kebangsaan Malaysia
publishDate 2012
url http://journalarticle.ukm.my/4863/1/13%2520THS%2520Dhahi.pdf
http://journalarticle.ukm.my/4863/
http://www.ukm.my/jsm/contents.html
_version_ 1643736230445187072
score 13.211869

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