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Investigating the impact of growth temperature on WS2 thin film

Radio-frequency (RF) Magnetron Sputtering was used to deposit thin tungsten di sulfide (WS2 ) films on top of soda lime glass substrates. Deposition temperature of RF magnetron sputtering was varied from room temperature (RT) to 200o C with 50o C interval to investigate the impact on film cha...

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Main Authors: Md Khan Sobayel Rafiq,, Afida Ayob,, Badariah Bais,, Md Akhtaruzzaman,, Nowshad Amin,
Format: Article
Language:English
Published: Penerbit Universiti Kebangsaan Malaysia 2020
Online Access:http://journalarticle.ukm.my/17356/1/04.pdf
http://journalarticle.ukm.my/17356/
https://www.ukm.my/jkukm/si-31-2020/
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spelling my-ukm.journal.173562021-08-23T02:21:13Z http://journalarticle.ukm.my/17356/ Investigating the impact of growth temperature on WS2 thin film Md Khan Sobayel Rafiq, Afida Ayob, Badariah Bais, Md Akhtaruzzaman, Nowshad Amin, Radio-frequency (RF) Magnetron Sputtering was used to deposit thin tungsten di sulfide (WS2 ) films on top of soda lime glass substrates. Deposition temperature of RF magnetron sputtering was varied from room temperature (RT) to 200o C with 50o C interval to investigate the impact on film characteristics as well as to optimize for suitable application in thin film solar cells. Structural and opto-electronic properties of as-grown films were investigated and analyzed for different growth temperatures. All the WS2 films exhibit granular structure consist of rhombohedral phase with a strong preferential orientation towards (101) crystal plane. Optical bandgaps are ranged from 1.73 eV to 2.3 eV for different growth temperatures. As-grown films show higher carrier concentration with n-type conductivity. Polycrystalline ultra-thin WS2 film with bandgap of 2.4 eV, carrier concentration of 2.28 X 1017 cm-3 and resistivity of 1.52 Ω-cm were successfully achieved at 50o C with 50 W RF power that can be employed as window layers in thin film solar cells. Penerbit Universiti Kebangsaan Malaysia 2020 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/17356/1/04.pdf Md Khan Sobayel Rafiq, and Afida Ayob, and Badariah Bais, and Md Akhtaruzzaman, and Nowshad Amin, (2020) Investigating the impact of growth temperature on WS2 thin film. Jurnal Kejuruteraan, 3 (1(SI)). pp. 23-28. ISSN 0128-0198 https://www.ukm.my/jkukm/si-31-2020/
institution Universiti Kebangsaan Malaysia
building Tun Sri Lanang Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Kebangsaan Malaysia
content_source UKM Journal Article Repository
url_provider http://journalarticle.ukm.my/
language English
description Radio-frequency (RF) Magnetron Sputtering was used to deposit thin tungsten di sulfide (WS2 ) films on top of soda lime glass substrates. Deposition temperature of RF magnetron sputtering was varied from room temperature (RT) to 200o C with 50o C interval to investigate the impact on film characteristics as well as to optimize for suitable application in thin film solar cells. Structural and opto-electronic properties of as-grown films were investigated and analyzed for different growth temperatures. All the WS2 films exhibit granular structure consist of rhombohedral phase with a strong preferential orientation towards (101) crystal plane. Optical bandgaps are ranged from 1.73 eV to 2.3 eV for different growth temperatures. As-grown films show higher carrier concentration with n-type conductivity. Polycrystalline ultra-thin WS2 film with bandgap of 2.4 eV, carrier concentration of 2.28 X 1017 cm-3 and resistivity of 1.52 Ω-cm were successfully achieved at 50o C with 50 W RF power that can be employed as window layers in thin film solar cells.
format Article
author Md Khan Sobayel Rafiq,
Afida Ayob,
Badariah Bais,
Md Akhtaruzzaman,
Nowshad Amin,
spellingShingle Md Khan Sobayel Rafiq,
Afida Ayob,
Badariah Bais,
Md Akhtaruzzaman,
Nowshad Amin,
Investigating the impact of growth temperature on WS2 thin film
author_facet Md Khan Sobayel Rafiq,
Afida Ayob,
Badariah Bais,
Md Akhtaruzzaman,
Nowshad Amin,
author_sort Md Khan Sobayel Rafiq,
title Investigating the impact of growth temperature on WS2 thin film
title_short Investigating the impact of growth temperature on WS2 thin film
title_full Investigating the impact of growth temperature on WS2 thin film
title_fullStr Investigating the impact of growth temperature on WS2 thin film
title_full_unstemmed Investigating the impact of growth temperature on WS2 thin film
title_sort investigating the impact of growth temperature on ws2 thin film
publisher Penerbit Universiti Kebangsaan Malaysia
publishDate 2020
url http://journalarticle.ukm.my/17356/1/04.pdf
http://journalarticle.ukm.my/17356/
https://www.ukm.my/jkukm/si-31-2020/
_version_ 1709668479534104576
score 13.211869

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