Image reversal resist photolithography of silicon-based platinum and silver microelectrode pattern
Silicon-based platinum (Pt) and silver (Ag) microelectrodes are constructed using photolithography technique and used in detecting arsenic activity in different electrolytes. Pt and Ag have good properties either as a working, a counter, or a reference electrode due to their low electrical resistanc...
Saved in:
Main Authors: | Nurulhaidah Daud,, Nor Farhah Razak,, Normahirah Nek Abd Rahman,, Azizah Mohd Zahidi,, Chin, Siew Xian, Tengku Elmi Azlina Tengku Muda, |
---|---|
Format: | Article |
Language: | English |
Published: |
Penerbit Universiti Kebangsaan Malaysia
2021
|
Online Access: | http://journalarticle.ukm.my/16509/1/22.pdf http://journalarticle.ukm.my/16509/ https://www.ukm.my/jsm/malay_journals/jilid50bil2_2021/KandunganJilid50Bil2_2021.html |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Similar Items
-
Conventional photolithography and process optimization of pattern- size expansion technique for nanogap biosensor fabrication
by: Balakrishnan, Sharma Rao, et al.
Published: (2014) -
Glucose detector by using conventional photolithography technique
by: Mohd Nurfaiz, Mohd Asri, et al.
Published: (2014) -
Parallel scanning near-field photolithography: the Snomipede
by: Ul-Haq, Ehtsham, et al.
Published: (2010) -
Fabrication of platinum membrane on silicon for MEMS microphone
by: Hamzah, A.A., et al.
Published: (2017) -
Pedot: PSS–modified platinum microelectrodes for measurements in aqueous media: Effect of polymer surface area on long-term anodic peak current stability
by: Benoudjit, Abdel Mohsen, et al.
Published: (2017)