Staff View: Image reversal resist photolithography of silicon-based platinum and silver microelectrode pattern

Image reversal resist photolithography of silicon-based platinum and silver microelectrode pattern

Silicon-based platinum (Pt) and silver (Ag) microelectrodes are constructed using photolithography technique and used in detecting arsenic activity in different electrolytes. Pt and Ag have good properties either as a working, a counter, or a reference electrode due to their low electrical resistanc...

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Main Authors:	Nurulhaidah Daud,, Nor Farhah Razak,, Normahirah Nek Abd Rahman,, Azizah Mohd Zahidi,, Chin, Siew Xian, Tengku Elmi Azlina Tengku Muda,
Format:	Article
Language:	English
Published:	Penerbit Universiti Kebangsaan Malaysia 2021
Online Access:	http://journalarticle.ukm.my/16509/1/22.pdf http://journalarticle.ukm.my/16509/ https://www.ukm.my/jsm/malay_journals/jilid50bil2_2021/KandunganJilid50Bil2_2021.html
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id	my-ukm.journal.16509
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spelling	my-ukm.journal.165092021-04-28T07:32:38Z http://journalarticle.ukm.my/16509/ Image reversal resist photolithography of silicon-based platinum and silver microelectrode pattern Nurulhaidah Daud, Nor Farhah Razak, Normahirah Nek Abd Rahman, Azizah Mohd Zahidi, Chin, Siew Xian Tengku Elmi Azlina Tengku Muda, Silicon-based platinum (Pt) and silver (Ag) microelectrodes are constructed using photolithography technique and used in detecting arsenic activity in different electrolytes. Pt and Ag have good properties either as a working, a counter, or a reference electrode due to their low electrical resistance, high melting point, and high chemical stability. This chemical sensor has the ability to detect the changes in the level or activity of arsenic in electrolytes. Patterning these metals by wet chemical or dry etching is not a feasible process as these metals cannot be etched properly. The lift-off process can be applied to ease the etching process, but it has a major problem whereby the metal particles or ears may remain at the edges at the end of the process. The process variables, particularly the resist slope, were investigated to reduce possible defects using an image reversal resist. The thickness and angle of the resist side wall were measured by SEM. The effects of many factors that may influence or resist steep angle formation were analyzed and optimized with the Design of Experiment (DOE) technique to achieve the target recipe of resist angle < 60°. The lower angle of the resist side wall resulted in a better percentage yield of good electrode pattern after the lift-off process. The ability of fabricated microelectrode and influence of supporting electrolytes in arsenic determination were discussed. Penerbit Universiti Kebangsaan Malaysia 2021-02 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/16509/1/22.pdf Nurulhaidah Daud, and Nor Farhah Razak, and Normahirah Nek Abd Rahman, and Azizah Mohd Zahidi, and Chin, Siew Xian and Tengku Elmi Azlina Tengku Muda, (2021) Image reversal resist photolithography of silicon-based platinum and silver microelectrode pattern. Sains Malaysiana, 50 (2). pp. 515-523. ISSN 0126-6039 https://www.ukm.my/jsm/malay_journals/jilid50bil2_2021/KandunganJilid50Bil2_2021.html
institution	Universiti Kebangsaan Malaysia
building	Tun Sri Lanang Library
collection	Institutional Repository
continent	Asia
country	Malaysia
content_provider	Universiti Kebangsaan Malaysia
content_source	UKM Journal Article Repository
url_provider	http://journalarticle.ukm.my/
language	English
description	Silicon-based platinum (Pt) and silver (Ag) microelectrodes are constructed using photolithography technique and used in detecting arsenic activity in different electrolytes. Pt and Ag have good properties either as a working, a counter, or a reference electrode due to their low electrical resistance, high melting point, and high chemical stability. This chemical sensor has the ability to detect the changes in the level or activity of arsenic in electrolytes. Patterning these metals by wet chemical or dry etching is not a feasible process as these metals cannot be etched properly. The lift-off process can be applied to ease the etching process, but it has a major problem whereby the metal particles or ears may remain at the edges at the end of the process. The process variables, particularly the resist slope, were investigated to reduce possible defects using an image reversal resist. The thickness and angle of the resist side wall were measured by SEM. The effects of many factors that may influence or resist steep angle formation were analyzed and optimized with the Design of Experiment (DOE) technique to achieve the target recipe of resist angle < 60°. The lower angle of the resist side wall resulted in a better percentage yield of good electrode pattern after the lift-off process. The ability of fabricated microelectrode and influence of supporting electrolytes in arsenic determination were discussed.
format	Article
author	Nurulhaidah Daud, Nor Farhah Razak, Normahirah Nek Abd Rahman, Azizah Mohd Zahidi, Chin, Siew Xian Tengku Elmi Azlina Tengku Muda,
spellingShingle	Nurulhaidah Daud, Nor Farhah Razak, Normahirah Nek Abd Rahman, Azizah Mohd Zahidi, Chin, Siew Xian Tengku Elmi Azlina Tengku Muda, Image reversal resist photolithography of silicon-based platinum and silver microelectrode pattern
author_facet	Nurulhaidah Daud, Nor Farhah Razak, Normahirah Nek Abd Rahman, Azizah Mohd Zahidi, Chin, Siew Xian Tengku Elmi Azlina Tengku Muda,
author_sort	Nurulhaidah Daud,
title	Image reversal resist photolithography of silicon-based platinum and silver microelectrode pattern
title_short	Image reversal resist photolithography of silicon-based platinum and silver microelectrode pattern
title_full	Image reversal resist photolithography of silicon-based platinum and silver microelectrode pattern
title_fullStr	Image reversal resist photolithography of silicon-based platinum and silver microelectrode pattern
title_full_unstemmed	Image reversal resist photolithography of silicon-based platinum and silver microelectrode pattern
title_sort	image reversal resist photolithography of silicon-based platinum and silver microelectrode pattern
publisher	Penerbit Universiti Kebangsaan Malaysia
publishDate	2021
url	http://journalarticle.ukm.my/16509/1/22.pdf http://journalarticle.ukm.my/16509/ https://www.ukm.my/jsm/malay_journals/jilid50bil2_2021/KandunganJilid50Bil2_2021.html
_version_	1698697940157071360
score	13.211869

Image reversal resist photolithography of silicon-based platinum and silver microelectrode pattern

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