Light emitting diode (led) chip fabrication using low temperature processes
Commercial light emitting diode (LED) chips are fabricated using metal organic chemical vapor deposition (MOCVD) process, which require high temperature process of above 1000 degree Celsius (◦C). Therefore, alternative processes such as pulse sputtering deposition (PSD), thermal annealing and electr...
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| Main Authors: | , , , |
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| Format: | Book Section |
| Language: | en |
| Published: |
Penerbit Uthm
2019
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| Subjects: | |
| Online Access: | http://eprints.uthm.edu.my/3581/1/c%208%20DONE.pdf http://eprints.uthm.edu.my/3581/ |
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