Design Optimization of Multi Vacuum Manifold for Semiconductor Industry
This paper presents the design optimization of multi vacuum manifold in gripping system for semiconductor industry. The objectives of this study were to investigate the parameter of designing manifold in vacuum system and analyze the results base on simulation software. The study was focused on the...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | en |
| Published: |
2012
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| Subjects: | |
| Online Access: | http://eprints.utem.edu.my/id/eprint/7107/1/Taufik-1_%28Hal_4-10%29.pdf http://eprints.utem.edu.my/id/eprint/7107/ |
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