Effect of Driving Signals on Motion Characteristics of Multilayer Electrostatic Actuator Supported by Only Lubricating Liquid

The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage.

Bibliographic Details

Main Author:	Md Ghazaly, Mariam
Format:	Conference or Workshop Item
Language:	en
Published:	Elsevier 2012
Subjects:	TJ Mechanical engineering and machinery TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://eprints.utem.edu.my/id/eprint/6451/3/ICPT2012.pdf http://eprints.utem.edu.my/id/eprint/6451/
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