Screen-printed ceramic based MEMS piezoelectric cantilever for harvesting energy

Screen-printing technology provides a convenient method in fabricating thick-film conductive circuits and devices in the past few decades. Conventionally, piezoelectric thick-film is printed on alumina substrate with high mechanical Q-factor and resonates at higher frequency outside the range of am...

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Bibliographic Details

Main Authors:	Kok, Swee Leong, Abdul Rani , Othman, Azizah Shaaban , Ahmad
Format:	Article
Language:	en
Published:	Trans Tech Publications 2014
Subjects:	TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://eprints.utem.edu.my/id/eprint/14853/1/Advances%20in%20Science%20and%20Technology_Screen%20Printed%20Ceramic%20Based%20MEMS%20Piezoelectric%20Cantilever%20for%20Harvesting%20Enginer.pdf http://eprints.utem.edu.my/id/eprint/14853/ http://www.scientific.net/AST.90.84
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