Various sloped wall effect on Silicon on Insulator (SOI) phase modulator

This paper highlights the study of carrier injection effect on silicon-on-insulator phase modulator with various sloped wall waveguide structure. By default, the sloped angle 54.74° arises from anisotropic chemical etching with the waveguide aligned to the 〈111〉 crystal direction. However, etched su...

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Bibliographic Details

Main Authors:	Bidin, Mardiana, Shaari, Sahbudin, Menon, P Susthitha, Abdul Razak, Hanim, Haroon, Hazura, Arsad, Norhana, Abdullah, Huda
Format:	Article
Published:	American Scientific Publishers 2013
Subjects:	TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://eprints.utem.edu.my/id/eprint/13064/ http://www.ingentaconnect.com/content/asp/asl/2013/00000019/00000005/art00042
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