Reactive Ion Etching (RIE) Etched Wet-Silica-On-Silicon Analysis for Fluid Wettability

RIE etched wet silica-on-silicon analysis is more to surface roughness analysis which analysis on silica substrate after plasma etching especially on de-ionized water droplets testing for fluid wettability scope. The thick oxide is needed for RIE purpose and characterized the etching and surface pr...

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Bibliographic Details

Main Author:	Noor Aini Hamimah Abd. Rahim
Other Authors:	Prabakaran Poopalan, Assoc. Prof. Dr. (Advisor)
Format:	Learning Object
Language:	en
Published:	Universiti Malaysia Perlis 2008
Subjects:	Silica Reactive Ion Etching (RIE) Silica-on-silicon analysis Surface roughness analysis Atomic Force Microscope Wet-Silica-On-Silicon Analysis
Online Access:	http://dspace.unimap.edu.my/123456789/1333
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