Comparison Of Etching Optimization Process By Taguchi Method Using Minitab And Design Expert Software
A design of experiment for high throughput pad etch by reactive ion etch is reported. Design of Experiment (DOE) is a technique for optimizing process which has controllable inputs and measurable outputs. The L9 orthogonal array DOE using Taguchi method is applied for Passivation Module (Pad Etch...
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| Format: | Learning Object |
| Language: | en |
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School of Microelectronic Engineering
2008
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| Online Access: | http://dspace.unimap.edu.my/123456789/1273 |
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