Growth of plasma-enhanced chemical vapour deposition and hot filament plasma-enhanced chemical vapour deposition transfer-free graphene using a nickel catalyst
This paper investigates the effects of radiant heat from implementing a hot filament (HF) in an existing Plasma-enhanced Chemical Vapour Deposition (PECVD) system on the growth of transfer-free graphene. The fabrication and properties of the transfer-free graphene grown using the HF-PECVD technique...
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| Main Authors: | , , |
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| Format: | Article |
| Published: |
Elsevier
2019
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/23783/ https://doi.org/10.1016/j.tsf.2019.06.045 |
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