Channel resolution enhancement through scalability of nano/micro-scale thickness and width of SU-8 polymer based optical channels using UV lithography

This paper reports on an approach for fabrication of micro-channels with nanometer thickness achieved by optimization of UV lithography processes. Rectangular micro-channels with a staple edge are fabricated over the surface of a silicon wafer substrate in which a sub-micron layer of diluted SU-8 th...

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Bibliographic Details

Main Authors:	Amiri, Iraj Sadegh, Sorger, Volker J., Ariannejad, Mohammad Mahdi, Ling, Xi, Ghasemi, M., Yupapin, Preecha Promphan
Format:	Article
Published:	Springer Verlag (Germany) 2018
Subjects:	QD Chemistry TK Electrical engineering. Electronics Nuclear engineering TP Chemical technology
Online Access:	http://eprints.um.edu.my/22485/ https://doi.org/10.1007/s00542-017-3581-8
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