Design and analysis of MEMS high sensitive capacitive pressure sensor

In this study, MEMS high sensitive capacitive pressure sensor based on poly-silicon diaphragm have been designed and analysed by using COMSOL Multiphysics Software. Three sensor designs: clamped, 8 slotted and 4 slotted with and without Teflon (polytetrafluoroethylene) coating were tested and compar...

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Bibliographic Details

Main Authors:	Ali, M., Soin, N., Noorakma, A.C.W., Yusof, N., Hatta, S.F.W.M.
Format:	Article
Published:	Medwell Journals 2016
Subjects:	TA Engineering (General). Civil engineering (General) TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://eprints.um.edu.my/18230/ http://medwelljournals.com/abstract/?doi=jeasci.2016.2688.2692
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