Abdul Rahman, M., Chiu, W., Haw, C., Badaruddin, R., Tehrani, F., Rusop, M., . . . Rahman, S. (2017). Multi-phase structured hydrogenated amorphous silicon carbon nitride thin films grown by plasma enhanced chemical vapour deposition. Elsevier.
Chicago Style (17th ed.) CitationAbdul Rahman, M.A., W.S Chiu, C.Y Haw, R. Badaruddin, F.S Tehrani, M. Rusop, P. Khiew, and S.A Rahman. Multi-phase Structured Hydrogenated Amorphous Silicon Carbon Nitride Thin Films Grown by Plasma Enhanced Chemical Vapour Deposition. Elsevier, 2017.
MLA (9th ed.) CitationAbdul Rahman, M.A., et al. Multi-phase Structured Hydrogenated Amorphous Silicon Carbon Nitride Thin Films Grown by Plasma Enhanced Chemical Vapour Deposition. Elsevier, 2017.
