Optimized scratch adhesion for TiSiN coatings deposited by a combination of DC and RF sputtering

This paper outlines an experimental study of the TiSiN coatings deposited using a combination of direct current (DC) and radio frequency (RF) PVD magnetron sputtering (DR-PVD) on high speed steel (HSS) substrates. An L9 Taguchi orthogonal array was used to conduct the experiments for finding the opt...

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Bibliographic Details

Main Authors:	Bushroa, Abdul Razak, Masjuki, Haji Hassan, Muhamad, Muhamad Rasat, Beake, B.D.
Format:	Article
Published:	Elsevier 2011
Subjects:	TA Engineering (General). Civil engineering (General)
Online Access:	http://eprints.um.edu.my/11825/ http://doi.org/10.1016/j.surfcoat.2011.07.048
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