Measurement of dielectric constant of silicon wafer using microwave non-destrictive testing and direct current technique: article / Nadia Md Kamal
This paper presents comparison between measurement of dielectric constant of silicon wafer by using MNDT which is at high frequency and by using HIOKJ 3532-50 LCR HiTESTER which at low frequency. Measurement of dielectric properties of silicon wafer at microwave frequencies is performed in free spac...
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| Format: | Article |
| Language: | en |
| Published: |
2010
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| Online Access: | https://ir.uitm.edu.my/id/eprint/99416/1/94416.pdf https://ir.uitm.edu.my/id/eprint/99416/ |
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