Fabrication and evaluations of PZT thin films by RF reactive sputtering using solid oxygen-source / Sukreen Hana Herman, Kimihiro Sasaki and Tomonobu Hata

PZT films were prepared on Pt/Ti/SiO2/Si substrate by RF reactive sputtering apparatus using metal-oxide composite ZrTi+PbO2 powder and pellet targets. The main sputtering conditions are as follows: sputtering gas is argon and oxygen, gas pressure is 1810-2Torr, 02/Ar flow rate is 0% and 4.2%, subs...

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Bibliographic Details

Main Authors:	Herman, Sukreen Hana, Kimihiro, Sasaki, Tomonobu, Hata
Format:	Conference or Workshop Item
Language:	en
Published:	2004
Subjects:	Temperature Electric apparatus and materials. Electric circuits. Electric networks Oxygen. Ozone
Online Access:	https://ir.uitm.edu.my/id/eprint/52734/1/52734.PDF https://ir.uitm.edu.my/id/eprint/52734/
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