Herman, S. H., & Halim, A. K. (2006). Study on the targets for PZT thin films fabrication process using Rf reactive sputtering / Sukreen Hana Herman and Abdul Karimi Halim.
Chicago Style (17th ed.) CitationHerman, Sukreen Hana, and Abdul Karimi Halim. Study on the Targets for PZT Thin Films Fabrication Process Using Rf Reactive Sputtering / Sukreen Hana Herman and Abdul Karimi Halim. 2006.
MLA (9th ed.) CitationHerman, Sukreen Hana, and Abdul Karimi Halim. Study on the Targets for PZT Thin Films Fabrication Process Using Rf Reactive Sputtering / Sukreen Hana Herman and Abdul Karimi Halim. 2006.
Warning: These citations may not always be 100% accurate.