Study on the targets for PZT thin films fabrication process using Rf reactive sputtering / Sukreen Hana Herman and Abdul Karimi Halim
The purpose of this research is to conduct a thorough study on the targets for PZT thin films fabrication process. The targets play a.very important role on determining the films composition and quality, thus by conducting a thorough study on the targets, will improve the process efficiency and also...
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| Main Authors: | , |
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| Format: | Research Reports |
| Language: | en |
| Published: |
2006
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| Subjects: | |
| Online Access: | https://ir.uitm.edu.my/id/eprint/48261/1/48261.pdf https://ir.uitm.edu.my/id/eprint/48261/ |
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