Study on the effect of etching process of NMOS structure using Silvaco TCAD tools: article

The effect due to the etching process of NMOS structure using Silvaco TCAD tools software was investigated using different etching methods by varying the etch rate and divergence rate. The etching methods are isotropic wet etching method and isotropic RIE etching method where the length of polysilic...

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Bibliographic Details

Main Authors:	Abd Rahim, Mohd Shahrir, Mohd Noor, Uzer
Format:	Article
Language:	en
Published:	2008
Subjects:	T Technology (General) TK Electrical engineering. Electronics. Nuclear engineering
Online Access:	https://ir.uitm.edu.my/id/eprint/125880/2/125880.pdf https://ir.uitm.edu.my/id/eprint/125880/
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